JPS62118445U - - Google Patents
Info
- Publication number
- JPS62118445U JPS62118445U JP600386U JP600386U JPS62118445U JP S62118445 U JPS62118445 U JP S62118445U JP 600386 U JP600386 U JP 600386U JP 600386 U JP600386 U JP 600386U JP S62118445 U JPS62118445 U JP S62118445U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- substrate
- beam source
- thin film
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 239000012495 reaction gas Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims 3
- 239000010409 thin film Substances 0.000 claims 3
- 239000007789 gas Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Formation Of Insulating Films (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP600386U JPS62118445U (en]) | 1986-01-20 | 1986-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP600386U JPS62118445U (en]) | 1986-01-20 | 1986-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62118445U true JPS62118445U (en]) | 1987-07-28 |
Family
ID=30788107
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP600386U Pending JPS62118445U (en]) | 1986-01-20 | 1986-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62118445U (en]) |
-
1986
- 1986-01-20 JP JP600386U patent/JPS62118445U/ja active Pending
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